Depth-selective analysis of buried semiconductor layers using X-ray grazing incidence diffraction
نویسندگان
چکیده
منابع مشابه
Grazing-Incidence X-Ray Diffraction
Contents 1. Geometry of GID 2. Typical applications 3. Experimental setups 4. Kinematical vs dynamical theory 5. GID in multilayers and matrix dynamical theory 6. Diffuse scattering in GID
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ژورنال
عنوان ژورنال: Acta Crystallographica Section A Foundations of Crystallography
سال: 1996
ISSN: 0108-7673
DOI: 10.1107/s0108767396080634